Preventative maintenance service for the deep etching system

STATEMENT OF WORK Vacuum Chamber Acquisition Background The SPTS HRM deep etching system is one of the most critical tools for fabricating micro- optical devices for several high-profile projects, such as PRIMA and HWO/NGMSA. Since the HRM is no longer supported by the original manufacturer, we rely on the experience and expertise of the contractor to maintain it and ensure it operates smoothly to meet project needs. This Statement of Work (SOW) establishes the requirements for a 12- month service contract and one week of on-site field service support for the STS DRIE HRM system in the Detector Development Lab located at NASA Goddard Space Flight Center. Requirements 1. Provide a 12-month service contract for preventive maintenance and field service support for the STS DRIE HRM system, including comprehensive system troubleshooting, operational assistance, diagnostics, maintenance support, process verification, and technical evaluation of the system. 2. Provide a 12-month preventive maintenance kit including all required chamber and load lock o-rings, valve rebuild kits, viewport assemblies, and replacement bearings necessary to complete scheduled preventive maintenance service, and one week of on-site field service support. Deliverables or Delivery Schedule 1. On-site Field Service Support: One week of on-site support to be scheduled by mutual agreement between the contractor and NASA GSFC 2. 12-Month Preventive Maintenance Kit: To be delivered to NASA GSFC on or prior to the onsite service Period of Performance The period of performance is one week on-site, scheduled by mutual agreement between the vendor and NASA GSFC's Integrated Detector and Electronic Systems Branch. -- 1 of 1 --