Versa 730 X-ray Computed Tomography Microscope

STATEMENT OF WORK/REQUIREMENTS DOCUMENT X-ray Computed Tomography Microscope I. BACKGROUND INFORMATION The Precision Imaging Facility at the National Institute of Standards and Technology (NIST) is involved in the characterization of metals, semiconductors, and insulators in support of multiple projects. Materials characterization allows NIST scientists to make direct correlations between material processing, (nano)structure, and resulting properties. This work involves the correlation of processing, structure, and properties of semiconductor material devices using three-dimensional X-ray computed tomography (XCT). Consistent with NIST’s mission to develop measurement science, a particular research focus is to evaluate the sources of systematic and statistical error that limit the efficacy of XCT techniques, to devise strategies to mitigate these uncertainties, and to develop metrics that quantify the results. NIST’s existing Zeiss Versa XRM 500 microscope system is over ten years old and no longer eligible for technical service support from the manufacturer or any third parties. NIST therefore now requires a new and serviceable microscope system to replace the old one. Compatibility with existing data and equipment is critical to the requirement. II. SCOPE The purpose of this requirement is to procure one Zeiss Versa XRM 730 X-ray Computed Tomography Microscope for micro-scale three-dimensional imaging of semiconductor materials and devices. III. MINIMUM REQUIREMENTS The Contractor shall provide one (1) Zeiss Versa XRM 730 X-ray Computed Tomography (XCT) Microscope system. The XCT instrument shall (1) accept prepared (e.g. a glass tube of powder) or bulk samples (e.g. a computer chip) for analysis, (2) generate a high-energy X-ray beam which is transmitted through the thin specimen, (3) detect the transmitted X-rays to produce an projected image of the specimen, (4) rotate and move the specimen using a built-in high-precision specimen while collecting additional images, and (5) use a software algorithm to reconstruct the collected images into a three-dimensional representation of the specimen. The system shall also include the following: A. System Resolution a. The system shall have an ultimate spatial resolution of 450 nm or smaller. b. The minimum achievable voxel size shall be 40 nm or smaller. c. The system shall be mechanically and electronically stable enough to perform continuous data collection actions that last up to 36 hours. -- 1 of 13 -- B. X-ray Source: a. The X-ray source shall be a sealed tube X-ray source b. The source voltage shall be variable from 30 kV to 160 kV c. The maximum power output shall be 25 W or higher. d. All X-ray source parameters shall be fully controllable from the instrument control software. e. The instrument shall include all X-ray filters that are required to achieve optimal imaging performance for all X-ray powers, detectors, imaging modes, and software packages included in these specifications. i. The tool shall include a “filter wheel” or similar fixture to house multiple X-ray filters. ii. The X-ray filters within the “filter wheel” shall be adjustable via the instrument control software without physical interaction with the tool. f. The X-ray source shall move as necessary to accommodate all lenses, detectors, and imaging modes. C. Specimen Stage: a. The specimen stage shall allow for 360º rotation of a specimen. b. The specimen stage shall have a minimum travel of: i. 50 mm in the X-direction (horizontal, perpendicular to the X-ray source) ii. 100 mm in the Y-direction (parallel to the X-ray source) iii. 50 mm in the Z-direction (vertical, perpendicular to the x-ray source) c. The stage shall accommodate specimens with a mass up to 25 kg D. Optics a. If required by the system design, the instrument shall include all lenses and other optics to attain the system resolution(s) in Section A of this document. b. The system shall include a two-stage optics-based magnification/detection system to leverage both geometric and optical magnification. i. The optical system shall include lenses with magnifications of 0.4X, 4X, 20X, and 40X. ii. The optical system shall include a detector that is at least 60 megapixels E. Detectors, Cameras, and Imaging Modes a. The instrument shall include a visible light camera inside the radiation enclosure to visualize stage movements with the enclosure door closed. b. The system shall include a flat-panel type X-ray detector. i. The total detector size of shall be 6 megapixels or more. ii. The flat panel detector shall allow for a spatial resolution of 12 μm or smaller. -- 2 of 13 -- c. The system shall include all required optics, lenses, detectors, or imaging modes to allow for the maximum resolution specified in Section A of this document. d. The system shall include all lenses, detectors, software, and imaging modes required to enable a wide-field imaging mode using one of the standard detectors listed in item b above. e. The system shall include all lenses, detectors, software, and imaging modes require to enable a wide-field imaging mode with a maximum 2D field of view of 140 mm x 93 mm. f. The system shall be field upgradable to include a diffraction contrast tomography imaging mode, including all detectors, hardware, and software to enable diffraction contrast tomography. F. Software a. The instrument shall include software that provides full control over the instrument, including, but not limited to: i. Adjusting X-ray energy and/or power ii. Moving all instrument stages in all dimensions iii. Starting, stopping, or modifying data acquisition iv. Saving all data and metadata in an accessible, open format and/or providing full, easy to use export to open formats such as hdf5 or similar for both raw (projection, stage motions, etc.) and processed (3D reconstructions, volumetric resolutions, etc.) data and metadata. b. The Contractor shall include software and associated…