CHIPS R&D X-Ray Tube Source

STATEMENT OF WORK Title: X-ray tube source   BACKGROUND INFORMATION  The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.  The CHIPS Research and Development Office is sponsoring a NIST research project to study the x-ray properties of materials used in the semiconductor industry. Specifically, the project aims to perform complete, accurate, modern measurements of the fundamental atomic parameters that govern x-ray emission and absorption processes for semiconductor-relevant chemical elements. These atomic x-ray data are used by vendors who make x-ray analysis tools used in the industry, such as x-ray fluorescence spectroscopy analyzers. NIST’s Physical Measurements Laboratory (PML), Quantum Sensors Division (QSD) uses novel cryogenic microcalorimeters to perform x-ray spectroscopic measurements of unprecedented energy resolution. NIST seeks an x-ray emission source to enable these measurements. The source will be used in a standard laboratory setting, exciting x-ray fluorescence from a range of solid samples. NIST’s cryogenic calorimeter spectrometers will then characterize the fluorescence emission. The objective of the required x-ray source is to enable wholesale updating of the standard x-ray data relevant to the analytical needs in the semiconductor industry.   PURPOSE NIST seeks an x-ray emission source to enable measurements of the fundamental atomic properties of materials used in semiconductor manufacturing. The source will emit x rays of energy up to 15 keV. It will be used in a standard laboratory setting, to excite x-ray fluorescence from a range of solid samples. NIST’s cryogenic calorimeter spectrometers will then characterize the fluorescence emission spectra. Standard x-ray data tables will be expanded to include these new, improved information. The objective of this acquisition is an x-ray source, capable of varying key source parameters (accelerating voltage, output intensity) and offering some degree control over the source spectrum, by use of two or more anode materials. Built-in x-ray safety systems are required.   MINIMUM REQUIREMENTS The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable. Line Item 0001: Description: X-ray tube source with multiple anodes Quantity: 1 Technical Specifications Operation with electron acceleration voltage of at least 15 kV. Power of at least 10 watts. Include power supply and necessary wiring. Safety system to include: Hand-operated shutoff switch Physical key required to energize the source Safety interlock: source can only be energized when its output is under partial vacuum. OPTION Line Item 0002: Description: Additional anodes Quantity: 1 to 6 Technical Specifications Additional anode materials to vary the x-ray output spectrum. This can be accomplished by either: Supplying a single x-ray source with user-exchangeable anodes Supplying a second separate sources with a distinct anode   OPTION Line Item 0003: Description: Higher-voltage operation Quantity: n/a Technical Specifications Electron acceleration potential up to 20 kV, 25 kV, or 30 kV, at vendor’s discretion, only required as an option if the base model (line item 0001) does not operate above 15 kV. OPTION Line Item 0004: Description: X-ray focusing or collimating optics Quantity: 1 Technical Specifications An optic to focus x rays to a mm-scale spot, or an optic to collimate into a parallel beam, or both. SCHEDULE OF DELIVERABLES  Deliverable Number Description Quantity Due Date Place of Delivery 1  X-ray source, with all power, safety, and control systems (line items 1-3) 1  No later than 26 weeks after receipt of order. NIST Boulder 2   Optional optic (line item 4)  1  No later than 26 weeks after receipt of order. NIST Boulder   Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 4 weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)  DELIVERY TERMS Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the above table. FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to: National Institute of Standards and Technology Shipping and Receiving 325 Broadway, Building 24 Boulder, Colorado 80305 TRAINING The contractor shall conduct training session for up to five users at NIST. The training shall provide a thorough demonstration of all system/solution functions, m…