High-Field Electromagnet System for MRAM Metrology

STATEMENT OF WORK Title: High-Field Electromagnet System for MRAM Metrology Lab: Physical Measurement Laboratory, 686.12 I. BACKGROUND INFORMATION The semiconductor supply chain is global, specialized, and interconnected. To address R&D ecosystem gaps, NIST will conduct measurement science, or metrology, critical to the development of new materials, devices, packaging, and production methods in chip manufacturing by US manufacturers. This acquisition is for CHIPS project GC7.05: Assured Sanitization of Ultrahigh Density Magnetic Memory and Storage Devices. MRAM is an emerging memory that is already taking the place of embedded flash at advanced technology nodes. This project requires determination of the assured erasure (sanitization) of MRAM devices. The switching field probability distributions of MRAM devices will be measured to determine field values ensuring erasure of the entire distribution of devices. These values will inform NIST in the development of field-based sanitization protocols. The field may also be used to ensure the state of the device independent of electronic interface. II. PURPOSE The purpose of this acquisition is to procure a high-field electromagnet system, including a bipolar power supply system, to facilitate MRAM device metrology. This type of measurement requires magnetic fields to be applied in a wafer prober, in a direction perpendicular to the wafer, to be swept from negative to positive values. NIST will employ these measurements on many devices over the course of hours and days, so repeatability and thermal stability are critical. PLACE OF PERFORMANCE The place of performance shall be the contractor’s place of business. Delivery of the high-field electromagnet system, including remote installation and demonstration, shall take place at NIST, located in Boulder, CO. PERIOD OF PERFORMANCE The period of performance is for two (2) months, to be effective on the date of award. III. SPECIFIC REQUIREMENTS The Contractor shall provide a High-Field Electromagnet system that meets all minimum technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable. Line Item 0001: Description: High-field electromagnet system for integration into a commercial wafer probe station. Quantity: 1 -- 1 of 5 -- 2 | P a g e A. Technical Specifications: a. Field Strength: Must be capable of producing 0.5 T fields at approximately 5 mm from the pole face. b. Field Orientation: Capable of applying fields in the direction perpendicular to the wafer. c. Power Supply: Must include a dedicated bipolar power supply to allow field sweeping from negative to positive values. d. Physical Dimensions: The magnet must fit within a volume (Length x Width x Height) of 11.5 cm x 11.5 cm x 19 cm. e. Operational Duty: Must be capable of continuous operation at 0.5 T. f. Cooling: The system must include provisions for cooling to support continuous 0.5 T operation. Chiller/process chilled water will be supplied by NIST. g. Control Interfaces: The field value shall be controllable by an external analog voltage AND additionally via standard computer interface (e.g., USB, GPIB, or Ethernet). h. Must contain a method for measuring magnet over-temperature. B. Installation: a. The contractor shall perform installation in accordance with Section VI. Installation described below. b. The Contractor shall deliver an installation manual, utility requirements, and schematics to NIST on or around delivery and before installation. IV. SCHEDULE OF DELIVERABLES The following table lists the deliverables that shall be completed, including a description, quantity, due date, and place of delivery. The place of delivery is associated with the Delivery terms in Section no. 5 Below. The NIST COR will review all deliverables for inspection and acceptance within the Standards of Acceptance criteria below. Deliverable Number Description Quantity Due Date Place of Delivery 1 High-field electromagnet and bipolar power supply system 1 No later than 6 weeks after receipt of order. NIST Boulder, CO 2 Installation manual, utility requirements, and schematics 1 After delivery, prior to installation. NIST Boulder, CO 3 Installation support and verification 1 Within 2 weeks after delivery Remote support Standards of Acceptance: The NIST Contracting Officer’s Representative (COR) shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 2 weeks of receipt of -- 2 of 5 -- 3 | P a g e deliverable. This section applies to deliverables which must be reviewed and approved for acceptance (e.g., draft plans, drawings, etc.). V. DELIVERY TERMS Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table. FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. National Institute of Standards and Technology Shipping and Receiving 325 Broadway Boulder, CO 80305 Attention/POC Matthew R. Pufall, M/S 686.12 Building 1, Room 1-4537 VI. INSTALLATION Installation and verification will be performed by NIST staff. No installation is required by the contractor. The contractor must be available by phone or video con…