PLASMA PRO 100

Page 1 of 8 STATEMENT OF WORK FOR PURCHASE OF OXFORD PLASMA PRO 100 WRIGHT-PATTERSON AFB 14 April 2026 1. DESCRIPTION OF SERVICES. The Contractor shall provide all personnel, equipment, tools, parts, and supervision necessary to perform installation, setup, testing and training of faculty, and staff, as well as support equipment; chillers and vacuum systems, listed in Appendix A (attached). Equipment is located in the Engineering Laboratory, Air Force Institute of Technology (AFIT), Wright-Patterson AFB OH. This will be a one-year purchase order. Service maintenance and repair tasks shall be in accordance with the procedures recommended by the respective equipment manufacturer. A periodic maintenance schedule shall be developed before the start of the contract. 1.1. PERIOD OF PERFORMANCE (POP): 120 days after Contract Award. 1.2. BASIC SERVICES. The Contractor shall install, setup, operate, train and ensure all supporting equipment processes are functional in accordance with manufacturer’s recommendations and standard commercial practices. Upon notification by the laboratory supervisor, the Contractor shall train required faculty and staff peronnel through the commissioning process and ensure items included in the price as quoted are adhered to as written in the quote. • Process guarantee (to be agreed) • Commissioning • One system manual (USB memory stick) • Packaging and crating included • Service packages & credits 1.3. EQUIPMENT. Equipment being placed for the first time under preventative maintenance service shall be in good operating conditions and shall be subject to inspection and acceptance by the Contractor/System Manager at the time order is placed. The Contractor will notify the ordering agency of any machines not acceptable for maintenance within 30 days. Services required to bring equipment up to standard operating conditions will be performed under separate order. The Contractor shall obtain approval of the Government inspector or the laboratory supervisor before removing any item from its existing location. 1.4. NEW EQUIPMENT. This order/contract may be amended to include new machines and delete existing machines. Any addition or deletion of machines will result in a modification to the contract. The contractor will ensure the following product summary standards are included, installed, tested and fully operational: -- 1 of 8 -- Page 2 of 8 • PlasmaPro 100 ICP Etch system • 208V 60Hz 3phase supply configuration • 10m process chamber cable • PC & 22" monitor • Chamber right hand build configuration • RF low power bias kit • ALE gas dose kit • RF 600W generator & amu match for ETCH • Cobra300 3kW ICP plasma etch source (inc RF generator & amu) • Electrostatic Shield for ICP plasma source • 100mT CM gauge • Cryo-cooled / electrically-heated etch lower electrode kit • Wafer clamping and helium backing kit • Julabo FP51 chiller • 5m chiller cable • Quartz clamp with continuous contact - 100mm diameter wafer • Standard Gas Pod externally mounted (12 lines max) • Split gas manifold, 2 points, 1 chamber • Gasline heating kit suitable for toxic gasline • Gasline heating kit suitable for non-toxic gasline • Gas pod wall mounted • 5m gas pod power cable • BP1C-GP-MFC-MKS • 8x Standard gasline and MFC for non-toxic gases • 2x By-passed gasline and MFC for toxic gases • Adixen ATH1600MT turbo, ISO200 pipework, apc & heated backing valve kit • Pfeiffer A124H ELT pump kit • 10m pump cable • PlasmaPro 100 Chamber and pump down pipe Heating Kit • PlasmaPro 100 Pumping Foreline Heating Kit • Variable wavelength Ocean Optics optical EPD Kit • PlasmaPro100 Single loadlock kit • Roughing only to Dry Pump - Isolation Valve included • Loadlock soft pump kit • Loadlock soft vent kit • Pfeiffer ACP15G dry pump kit 1.5. GOVERNMENT REGULATIONS: All Contractor personnel performing work under this contract must comply with all applicable Air Force and local regulations. Of specific concern are regulations regarding wearing of badges, access lists, and safety. -- 2 of 8 -- Page 3 of 8 a. The Contractor and Contractor personnel shall be required to register their privately owned vehicles and obtain vehicle passes and decals in accordance with Wright- Patterson AFB AFI 31-204. All passes and decals must be turned in to the Pass and Registration Section upon contract completion or termination of the contract. b. The Contractor must maintain working areas in a clean and orderly fashion. c. Where Government material is provided, the Contractor must protect such material. Similarly, the Contractor must protect the Government work areas and facilitates; where applicable. d. The Contractor is expected to perform in a safe manner. Appropriate safety manuals are available for use and will be complied with. Should any injuries occur during the performance period of this contract, the Contractor must notify the Contracting Officer in writing within 24 hours of such injury. e. The Contractor will notify the contracting officer in writing within 24 hours of any actual or potential labor disputes. 1.6. SERVICE CALL RESPONSE. The Contractor shall respond to a repair service request as written in the quoted contract agreement. Service repair calls will occur when appliances malfunction or fail to operate properly. 1.7. SERVICE RECORDS. The Contractor shall maintain service history records for the equipment items (by serial number) serviced. Each service record shall contain the following minimum information. These service records shall be made available to the Lab Supervisor upon request and shall be delivered to the System Manager upon termination or completion of the contract: a. Dates of maintenance coverage under Monthly Maintenance. b. Services performed on the item and copy of the Malfunction Report. 1.8. EQUIPMENT REPAIR. The Contractor shall return equipment to operational condition within 5 days after notification of service requirement, un…