Commercial trace gas analyzer

TEMPLATE STATEMENT OF WORK Title: Commercial Trace Gas Analyzer Lab: Chemical Sciences Division I. BACKGROUND INFORMATION The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing. As part of CHPS Grand Challenge 1: Metrology for Materials Purity, Properties, and Provenance, we will create measurement technology, reference data and materials to perform trace impurity gas analysis at new levels of precision. Success will enable next-generation diagnostics to reliably identify impurities in process gases at sub-parts- per-billion (<1 ppb) levels. Results will drive partners to develop industry ready reference materials, point-of-use diagnostics and models to achieve breakthroughs in critical tooling like extreme ultra-violet lithography. Our diagnostics and metrology-grade data will enhance quality systems by establishing a framework for impurity fingerprinting with traceability to new gas primary standards, reference materials and documentary standards. NIST requires a commercial trace gas analyzer to serve as a benchmark for newly developed ultra-sensitive optical diagnostics. Current optical diagnostics relied upon by the semiconductor industry suffer from trade-offs between sensitivity and quantitation. This analyzer will be used in tandem with NIST-developed cavity ring-down spectroscopy (CRDS) to verify the performance of new analytical instrumentation and contribute to the certification of gas reference materials (RMs). This acquisition supports the CHIPS R&D Metrology Program's goal of establishing reliable data for trace impurities. II. PURPOSE The Chemical Sciences Division (CSD) is part of the Materials Measurement Laboratory (MML) at NIST. MML serves as the national reference laboratory for measurements in the chemical, biological, and materials sciences. MML provides the measurement science, standards, technology, and data required to support the nation's need to design, develop, manufacture, and use materials. This acquisition directly supports the Division's mission by providing a standardized tool for the verification of primary gas standards and the characterization of new high-quality semiconductor and electronics gases. The Gas Sensing Metrology Group (GSMG) of the CSD will develop primary standards and reference materials for “zero gas” semiconductor and electronics-grade gases. -- 1 of 8 -- 2 | P a g e Development of such standards will require specialized instrumentation to properly separate, identify, and quantify trace impurities at sub-parts-per-billion levels. One of the instruments needed is a trace gas analyzer. This system will be utilized to confirm impurities in pure semiconductor grade gases purchased from vendors to qualify for use in gas mixture preparations, to verify the performance of new analytical instrumentation being developed, to validate new primary gas standards blended in-house, and to contribute to the certification of gas reference materials. III. MINIMUM REQUIREMENTS The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable. Line Item 0001: Description: Trace Gas Analyzer Quantity: One (1) A. Technical Specifications a. System i. The trace gas analyzer shall be configured for the analysis of gases to be delivered through a regulator from a gas cylinder. ii. The trace gas analyzer shall also have capability for online sampling, with gas flow delivered by a mass flow controller. iii. The trace gas analyzer shall have a detection limit of less than 1 part-per-billion (< 1 ppb) of impurities including, but not limited to, hydrogen (H2), carbon monoxide (CO), Nitrogen (N2), carbon dioxide (CO2), and argon (Ar) in pure gases including, but not limited to, helium (He), N2, and Ar. iv. The trace gas analyzer shall provide automated data acquisition suitable for routine laboratory diagnostics. b. Software i. The trace gas analyzer shall have software to control all functions. ii. Software documentation shall provide the user with information on how to control sample sequence, and method development. Line Item 0002 Description: Operations and Maintenance Manual Quantity: One (1) a. Manual iii. The contractor shall provide paper and/or electronic versions of the operations and maintenance manuals, which cover proper operation, routine maintenance, and troubleshooting for all system components and controlling software. -- 2 of 8 -- 3 | P a g e IV. SCHEDULE OF DELIVERABLES Define all deliverables and indicate (1) the quantity desired; (2) the format in which each deliverable is to be supplied; (3) the delivery date (based on the number of weeks/days); (4) the place of delivery. The context of each deliverable shall be clear. Keep in mind that every task does not require a deliverable. Deliverables are always tangible items (i.e., report, minutes, etc.) Complete the table providing the information for all the tasks identified above. Deliverable Number Description Quantity Due Date Place of Delivery 1 Trace Gas Analyzer One (1) No later than 90 days from the date of award. NIST (Gaithersburg) 2 Operations and maintenance manual One (1) No later than 90 days from the date of award. NIST (Gaithersburg) or electronic delivery if …